Setra 730 Vacuum Capacitance Manometer

The Setra 730 vacuum capacitance manometer is a high-accuracy absolute capacitance manometer (also referred to as Capacitance Diaphragm Gauge (CDG)), for measuring low vacuum pressure ranges critical to the control of processes in photovoltaic, semiconductor and industrial markets. The 730 uses welded, all-Inconel wetted components for use with the most aggressive process media. Inconel is highly resistive to the corrosive media used in semiconductor and industrial vacuum processes. The 730 manometer's high frequency electronics design is fully RoHS compliant and yields extremely low noise, while maintaining the fast response time required for critical control applications. The 730 also features external noise rejection, fast warm-up, and resistance to environmental effects.

The 730 capacitance manometer uses a rigid single-electrode variable capacitance sensing element resulting in high overpressure capability and superior long-term stability. The 730 features 0.5% of reading accuracy, low hysteresis, and high resolution, providing a wide dynamic range and making it an ideal fit for measuring and controlling critical manufacturing processes.

The 730 is designed with a diaphragm that measures pressure changes directly at the point of use; it is independent of the gas mixture being measured. This enables higher accuracy than a manometer that can only measure indirect pressure.

Setra 730 Vacuum Capacitance Manometer Applications

• Semiconductor
• Petrochemical
• Plasma sterilizers
• Vacuum packaging