CAS PUR-Therm Gas Delivery Heater
A more efficient and accurate method of heating chamber gases without sacrificing purity.
Overview
Features
- Clean and pure flow tube
- Particle Test: Meets Semi F-70 “Ultra-High Purity” spec
- Roughness (Ra): Meets Semi F-19 “Ultra-High Purity” spec
- Average Ra: 2.53 μin (0.064262 μm)
- Maximum Ra: 3.19 μin (0.081026 μm)
- Bend Radius: Complies with Semi E49 Guidelines for Inert and Reactive Gases (5 x Radius)
- Passivated to ASTM-967 specs
- Powerful and accurate heat
- Max Operating Temperature to 300°C (572°F)
- Standard Power: 208 Volt single phase, 400 Watts
- Replaceable Heating Element
- Dual Sensor Thermocouple: for accurate control of operating temps and secure over-temp protection
- Easily integrated
- Industry-Standard Gasline Flow-Tube Size: 1/4" (6.3 mm) OD, .035 Wall (.89 mm)
- Industry-Standard VCR Fittings (certified Ultra-High Purity) on Tube Inlet & Outlet
- Body Dimensions: 3.50” (89 mm) x 3.75” (95 mm)
Description
PUR-Therm gas delivery heaters from CAS are designed to heat critical carrier gases and process gases. Manufactured to meet the industry's stringent purity standards, PUR-Therm gives OEMs and fabricators a more efficient, more accurate method of heating chamber gases, without sacrificing purity.
CAS PUR-Therm gas delivery heaters utilize the benefits of cast-in components to deliver more heat at lower wattages. Compared to other heaters, PUR-Therm uses less energy to achieve the same Delta-T. PUR-Therm heaters comply with a comprehensive array of industry standards for High Purity and Ultra High Purity. Heated gases are isolated in high purity 316 seamless stainless steel flow-tube, never contacting the heating elements or any other heater components
CAS PUR-Therm gas delivery heaters are ideal for applications such as carrier gas heating, process gas heating, and air & nitrogen heating for wafer drying. Not only do PUR-Therm heaters deliver more accurate temperature control compared to other heaters, they also eliminate the messy wires & control mechanisms associated with flexible gasline heaters. Compatible with most standard controls, PUR-Therm gas delivery heaters can be easily installed into gas cabinets or integrated ‘in-line' at any point along the gas stream.
Documents
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